兴业证券：光刻机需求持续提升，半导体核心设备自主可控大势所趋

财中社2025-03-06

3月6日，兴业证券发布光刻机行业深度报告。文中写出光刻工艺是集成电路制造的关键步骤，光刻机是半导体工业皇冠上的明珠。光刻工艺是对光刻胶进行曝光和显影形成三维光刻胶图形的过程，直接决定了集成电路制造的微细化水平，集成电路整个制造过程中，光刻步骤至少要重复10次，一般要重复25-40次。光刻分辨率即光刻系统能清晰投影最小图像的能力。决定了光刻机能够被应用于的工艺节点水平。根据瑞利准则，通过缩短光源波长...

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