ASML即将发货首台第二代High NA EUV光刻机EXE:5200

IT之家2025-02-01

2 月 1 日消息，ASML 总裁兼首席执行官 Christophe Fouquet 在上月末的公司 2024 年第四季度财报电话会议上表示，该企业的首台第二代 0.55 (High) NA EUV 光刻机 TWINSCAN EXE:5200 即将以“早期工具”的身份开始发货，用于技术成熟度验证。▲ EXE:5000 系统EXE:5200 是现有初代 High NA EUV 光刻机 EXE:...

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