万业企业：今年凯世通自主研发生产的CIS低能大束流离子注入机正式入驻客户生产线

格隆汇2024-12-23

格隆汇12月23日丨万业企业(600641.SH)在互动平台表示，万业企业旗下凯世通紧跟技术发展趋势和客户需求，不断强化离子注入机领域的技术领先优势。针对 28nm 及更先进工艺对离子注入高精度、极少颗粒污染、高良率大产能的需求，采用多电极束流引出技术、超低能束流传输技术、离子束能量过滤技术、各向同性扫描、离子注入平台等技术，研制了注入角度控制更加精准的真空各向同性机械扫描系统、超细微颗粒污染控制...

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