消息称三星电子测试TEL公司Acrevia GCB设备以改进EUV光刻工艺

IT之家09-03

IT之家 9 月 3 日消息，据韩媒 The Elec 昨日报道，三星正对 Tokyo Electron (TEL) 的 Acrevia GCB 气体团簇光束（IT之家注：Gas Cluster Beam）系统进行测试。TEL 的 Acrevia GCB 系统发布于今年 7 月 8 日，可通过气体团簇光束对 EUV 光刻图案进行局部精确整形，从而修复图案缺陷、降低图案粗糙度。业内人士认为 TEL ...

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