消息称三星电子测试TEL公司Acrevia GCB设备以改进EUV光刻工艺

美港电讯09-03

【消息称三星电子测试TEL公司Acrevia GCB设备以改进EUV光刻工艺】金十数据9月3日讯，三星正对Tokyo Electron (TEL) 的Acrevia GCB气体团簇光束系统进行测试。TEL的Acrevia GCB系统发布于今年7月，可通过气体团簇光束对EUV光刻图案进行局部精确整形，从而修复图案缺陷、降低图案粗糙度。

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