光峰科技取得光栅干涉曝光系统专利，提升全息光栅干涉曝光质量

金融界07-07

金融界2024年7月7日消息，天眼查知识产权信息显示，深圳光峰科技股份有限公司取得一项名为“光栅干涉曝光系统“，授权公告号CN221261503U，申请日期为2023年8月。专利摘要显示，本申请公开了一种光栅干涉曝光系统，涉及全息光栅制造领域，包括发光装置、相位探测装置和至少两组相位调制组件，发光装置用于发出两束相干光束，两束相干光束经过不同路径传输后发生干涉形成干涉条纹，相位探测装置用于采集干涉...

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