龙腾光电取得一种光罩检查机构及光罩清洁设备专利，降低了对光罩的检测难度，提高了对光罩的检查效率

金融界06-21

金融界2024年6月21日消息，天眼查知识产权信息显示，昆山龙腾光电股份有限公司取得一项名为“一种光罩检查机构及光罩清洁设备“，授权公告号CN221200225U，申请日期为2023年12月。专利摘要显示，本实用新型涉及显示面板制造技术领域，尤其涉及一种光罩检查机构及光罩清洁设备。光罩检查机构包括风机组件、制冷风道和制热风道，制冷风道和制热风道均与风机组件相连通，风机组件用于向制冷风道和制热风道内...

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