国产光刻胶初露曙光

格隆汇2021-09-25

最近一段时间以来，因为地缘政治等因素的影响，国内对光刻胶的关注也逐渐增加。所谓光刻胶（又称光致抗蚀剂），据浙商证券的介绍，这是一种对光敏感的混合液体。其组成部分包括：光引发剂（包括光增感剂、光致产酸剂）、光刻胶树脂、单体、溶剂和其他助剂。光刻胶可以通过光化学反应，经曝光、显影等光刻工序将所需要的微细图形从光罩（掩模版）转移到待加工基片上。依据使用场景，这里的待加工基片可以是集成电路材料，显示面板...

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SteveCcc
2021-09-26
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2021-09-26
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666
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2021-09-25
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2021-09-25
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Alexkoay
2021-09-25
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[微笑]
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2021-09-25
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好好
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JSR、日本 TOK、信越化学、住友化学、富士胶片，美国的Shipley公司、陶氏化学，欧洲的AZ公司等；韩国的锦湖石化、东进世麦肯等，其中市场份额位居前列的公司为日本JSR、 TOK、住友化学、信越、陶氏化学公司。在ArF、ArF浸没式、G/I 线和KrF光刻胶市场方面，JSR、信越、TOK和日本住友化学占据主要市场份额。\n来到EUV光刻胶方面，在日本信越化学、JSR、东京应化工业公司加大投产，日本住友化学和富士胶片（Fujifilm）跃跃欲试，而JSR又收购了美国EUV光刻胶供应企业Inpria之后，日本在这方面的地位进一步加强了。\n国产企业初露曙光\n\n\n历经过去多年的发展，国产光刻胶进入今年也开始密集爆发。\n首先看备受行业关注的科华方面，据彤程新材日前介绍，在2021年上半年，公司旗下的北京科华半导体光刻胶业务实现营业收入5,647.83万元，同比增长46.74%；公司半导体用G/I线光刻胶产品较上年同期增长40.36%；KrF光刻胶产品较上年同期增长94.51%，\n彤程新材进一步指出，今年上半年，科华多款新产品出货放量，新增包括KrF光刻胶、高档I线光刻胶、化学放大型I线光刻胶在内的10支产品获得长江存储、中芯北方、广州粤芯、厦门士兰集科等用户订单，成为中芯国际、上海华力微电子、长江存储、武汉新芯、上海华虹宏力、华虹半导体（无锡）、华润上华、杭州士兰、吉林华微电子、中芯集成（绍兴）、北京燕东微电子、三安光电、华灿光电等行业顶尖客户的稳定合作伙伴。\n按照他们的说法，科华是本土半导体光刻胶龙头企业，唯一被SEMI列入全球光刻胶八强的中国光刻胶公司，拥有KrF（248nm）、g线、i线、半导体负胶、封装胶等产品，是中国大陆销售额最高的国产半导体光刻胶公司，KrF光刻胶国家02专项的承担单位，是国内第一家可以批量供应KrF光刻胶给本土8寸和12寸的晶圆厂客户。\n他们指出，国内所有的6寸客户全部处于和公司合作或在开发中的阶段，G/I线光刻胶在6寸市场占有率在60%以上；8寸用户增至15家，12寸客户增至8家。\n再看上海新阳方面，据他们在今年六月底发表的公告，公司自主研发的KrF (248nm)厚膜光刻胶产品近日已通过客户认证，并成功取得第一笔订单。\n新阳表示，KrF(248nm)厚膜光刻胶产品的开发和产业化是公司第三大核心技术——光刻技术的重要方向之一，本次产品认证的通过及订单的取得，标志着“KrF(248nm) 厚膜光刻胶产品的开发和产业化” 取得了成功，为公司在光刻技术领域目标的 全面完成奠定了坚实基础。\n在八月中下旬，新阳表示，公司的KrF光光刻胶已经取得了2家客户的订单，而ArF干法光刻胶则尚处于认证阶段。至于ArF浸没式光刻胶产品，则已有实验室样品，同样也处在测试阶段。按照他们的说法，超纯类产品的认证一般要九月左右，那就意味着到我们最迟到明年，应该看到他们的更多进展。\n另一个国产光刻胶参与者南大光电9月17日在投资者互动平台中表示，公司研发的ArF光刻胶产品已通过两家客户的认证，目前签订了小批量订单，尚未开始规模量产。量产时间需根据客户订单确定。从他们更早之前的消息可以看到，南大光电研发的ArF光刻胶产品分别通过一家存储芯片制造企业和一家逻辑芯片制造企业客户认证，其余客户的认证工作正在积极推进。\n同样在9月17日，晶瑞电材也强调，公司光刻胶产品达到国际中高级水准，在国内具有悠久声誉，稳定生产光刻胶近三十多年，是国内最早规模量产光刻胶的企业之一。\n他们进一步指出，光刻胶是国际上技术门槛最高的微电子化学品之一，高端产品的研发和生产主要由日系JSR、信越化学、东京应化等少数公司所垄断。而公司承担并完成了国家02专项“i线光刻胶产品开发及产业化”项目。\n据晶瑞电材所说，他们是我国历史最悠久、供应量最大的光刻胶生产企业之一，产品序列齐全，产业化规模、盈利能力均处于行业领先水平，其中g/i线光刻胶已向中芯国际、合肥长鑫等知名大尺寸半导体厂商供货，KrF（248nm深紫外）光刻胶完成中试，目前已进入客户测试阶段，测试通过后即可进入量产阶段。ArF高端光刻胶研发工作已正式启动，旨在研发满足90-28nm芯片制程的ArF（193nm）光刻胶，满足当前集成电路产业关键材料市场需求。\n另外，广信材料、飞凯材料都表示，公司的光刻胶产品正在送样，华懋科技也通过投资徐州博康来进入这个领域。据上海证券报的报道，徐州博康是国内最早从事光刻胶单体研发和量产的公司，长期为主流光刻胶公司供应单体。在丰富的单体技术积累基础上，徐州博康接连开展了树脂和光刻胶的研发，取得了多项突破。KrF胶已通过技术验证，被国内主流厂商批量采购用于量产；ArF胶的关键技术指标与国际水平非常接近，正在进行市场推广。\n需要补充一点，上述内容是笔者近来看到有消息披露的国产光刻胶进展，并不代表事实的全部。希望有识之士能够在此基础上增删修改。\n写在最后\n在八月，某网红券商分析师与国内晶圆大厂的相关人士就本土光刻胶有过一番争论。按照后者的看法，国产光刻胶一个能打的都没有。而前者回应的一句“你算老几”更是被广大媒体争先传播。\n这番争论背后，其实折射出了国产光刻胶的难。\n以193nm（ArF）高端光刻胶为例。前文提到的上海新阳那份报告中指出，193nm（ArF）高端光刻胶在国内一直是空白（截止到报告写的日期2018年），技术和产品一直掌握在国外几大专业厂商手中，同时懂得和拥有这方面技术的专业人才也同样被这几大专业厂商垄断。为此国内有多家公司和科研机构历经多年开发与探索，始终未能突破。\n报告同时指出， 193nm（ArF）高端光刻胶所需关键原材料与单体同高端光刻胶一样，掌握在国际少数几家大的专业厂商手中，国内有公司在开发这些材料，但目前（截止报告的发布时间2018年3月）不能满足需求，仍然要以进口为主，面临着被竞争对手封锁的风险。为此他们在开发 193nm（ArF）高端光刻胶的同时，与伙伴公司同时开发关键原材料与单体，确保本项目对原材料的需求与供应。\n新阳还进一步强调，集成电路制造企业对光刻胶的使用特别谨慎，验证周 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